Field Emission Scanning Electron Microscope / Energy Dispersive X-Ray (FE-SEM / EDX)

Field Emission Scanning Electron Microscopy (FESEM) provides topographical and structural information in plan or cross sectional view. Used in conjunction with SEM, Energy Dispersive X-Ray Spectroscopy (EDS or EDX) detects the elements present in a selected area of the SEM image providing qualitative and quantitative information. SEM applications include surface structure analysis, an increased depth of field, backscatter imaging and morphology. EDS applications include qualitative X-ray mapping, line scans and spot analysis.

Instruments:
• Hitachi S4800 High resolution SEM/STEM
• Philips FEI XL50 FEG SEM with Noran System Six EDS/EDX