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Analytical Chemistry Techniques


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Technique

Description

Typical Application

Sample Types

Working Range

Neutron Activation Analysis

(NAA)

Neutron Activation Analysis

Identify and measure trace contaminants in bulk materials

Inorganic materials such as polysilicon. Organic polymers tissues and biological materials.

ppt to ppb

High Resolution Inductively Coupled Plasma Mass Spectroscopy

(HR-ICPMS)

High Resolution Inductively Coupled Plasma Mass Spectrometer

Identify and measure trace metals in aqueous samples

VPD samples, ultra pure water, process chemicals, material extracts, chemical waste streams

ppt to ppb

Vapor Phase Decomposition 

(VPD)

Vapor Phase Decomposition

Collection process used to identify and measure trace metals on wafer surfaces.

Silicon wafers, hydrofluoric acid soluble thin films

E6 to E14 atoms/cm2

GeMeTec WSPS with PAD-Fume and PAD-Scan

Gemetec Wafer Surface Preparation System with Programmable Automated Decomposition Fumer and Programmable Automated Droplet Scanner

Automated VPD prep tool. Wafers are handled by robot in ULPA filtered class 10 environment and transferred from cassette stand to fuming module to scanning module.

Silicon wafers, hydrofluoric acid soluble thin films

E6 to E14 atoms/cm2

Inductively Coupled Plasma Optical Emission Spectroscopy

(ICPOES)

Inductively Coupled Plasma Optical Emission Spectrometer

identify and measure trace metals in aqueous samples

water, chemicals, material extracts, slurries, chemical waste streams

ppb to ppm

Fourier Transform Infrared Spectroscopy

(FTIR)

Micro Fourier Transform Infrared Spectrometer

identification of organic and inorganic compounds

Identify molecular composition of organic materials and polymers, characterize thin films, analyze non-reactive gases

wt%

Thermal Desorb Gas Chromatograph Mass Spectroscopy

(ATD-GC-MS)

Thermal Desorb Gas Chromatograph Mass Spectrometer

qualitative and quantitative analysis of organic compounds and mixtures

solvents, air samples, process chemicals, water, polymers, wafers

ppb to wt%

Ion Chromatography

(IC)

Ion Chromatography

aqueous ionics measurements

anions and cations in UPW, diluted chemicals, material extracts

ppb to ppm

Total Organic Carbon

(TOC)

Total Organic Carbon Analyzer

inorganic and organic carbon determinations in aqueous samples

water, water extracts

0.1 to 10ppm

Auto-Titrator

Potentiometry based autotitration systems

acid/base/chemical assays water content in organic solvents

process chemicals, cleaning baths, chemicals waste streams

0.1 to 10ppm

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