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Surface Science Techniques

Technique

Description

Typical
Applications

Signal Detected

Resolution

Imaging

DMS
Navigation
Capability

Minimum
Spot Size

SIMS
Secondary Ion Mass Spectroscopy

Mass analysis surface and depth profiling

Dopant or compositional element depth analysis

Secondary Ions

1e12 at/cm

Yes

No

1 μm

Quad-SIMS
Quadrupole Secondary Ion Mass Spectroscopy

Thin Film and Shallow Implant Depth Profile

Compositional element depth profile

Secondary Ions

1E16 at/cm

No

No

50µm x 50µm raster

TOF-SIMS
Time Of Flight SIMS

Surface mass analysis

Surface contamination

Secondary Ions

1e8 at/cm2

Yes

Yes

1 µm

AES
Auger Electron Spectroscopy

Elemental surface analysis

Depth profiling with Ar sputter, surface contamination, cross-section analysis

Auger electrons

0.1-1 at%

Yes

Yes

300 Å

ESCA
Electron Spectroscopy for Chemical Analysis (aka XPS)

Elemental Surface analysis

Depth profiling with Ar sputter, chemical state information, thin film composition analysis

Photoelectrons

0.1 at%

No

No

10 μm

XRD
X-Ray Diffraction

Crystal Orientation Analysis

Grain size, orientation, and texture analysis

Crytal plane d-spacing

+/-.5%

No

No

10 mm X 1mm
STD
special 1mm spot

XRR
X-Ray Reflection

Reflectivity Analysis

Density, Interface, Roughness, and Thickness of thin films

Reflected X-rays

+/- 3% of signals detected

No

No

10mm x 50mm

AFM
Atomic Force Microscopy

Surface topography

Roughness of thin films, and step height information

Atomic morphology

< 2 Å

Yes

Yes (Manual

50 Å

μ−RS
Micro-Raman Spectroscopy

Molecular composition

Defect analysis, thin film monitoring

Bond vibration frequencies

Sample dependent

No

Yes

1 μm

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